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Vaccum Lamination

Vacuum Lamination―Laminating film type material in vacuum environment―is the most suitable material application method for today’s microfabrication of devices.

Injecting compressed air into rubber balloon(Diaphragm) and its expansion presses material. Its pressure is mild and good at handling fragile materials(e.g. wafer). It is also good at laminating thin films on fine and narrow patterns.Rubber Press Lamination is powered by hydraulic power. The high-power rubber press laminator is good at laminating rigid resin into fine Patterns.Lamination is not enough to achieve enough planarity requirement. On CVP series, we have flattening stage. It flattens material with specular-finished SUS Plate.